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KMID : 1059520040480010039
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Journal of the Korean Chemical Society
2004 Volume.48 No. 1 p.39 ~ p.45
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A Novel Photoresist based on Polymeric Acid Amplifier
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이은주/Lee EJ
정용석/임권택/정연태/Jeong YS/Lim KT/Jeong YT
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Abstract
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KEYWORD
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